Plasma generation source
Low-frequency high voltage power supply, output approx. 50w, frequency 60KHz, output voltage 10kV
Electrode structure
Capacitive type, 2 segments
Gas flow meter
For oxygen, flow rate 30~300ml/min
Vacuum adjustment valve
For vacuuming, returning to atmosphere
Reaction chamber dimensions
Chamber dimensions Φ100×L160mm
External dimensions (W×D×H mm)
310×300×448
Vacuum pump interface
KF25 (recommended vacuum pump exhaust speed 30L/min)
Gas interface
Outer diameter Φ6.35mm