Long Life and for Chemical Use
Features
Usage of vacuum pumps to suction special gases has been increasing for using such gases in the chemical industry, the semiconductor industry, or general science applications. Conventional vacuum pumps will suffer significant shortening of service life due to corrosion or excessive wear on parts contact with such special gases causing troubles. PX series vacuum pumps are of chemical type and employ corrosion proof and wear-resistant materials for parts that may contact with gases.
Surfaces of pump casing and major structural parts are specially finished. O rings and other chemical parts are made of fluorine-based material and other parts employ corrosion proof materials.
The exhaust port employs a KF-25 quick coupling flange (ISO type) and its connection/removal to and from a pipe necessary for exhausting toxic and other gasses is easy. A KF-25 quick coupling flange can be installed onto the exhaust port as well. (Optional)
Oil Mist Separator (Corrosion-proof(OMC-200)
Vacuum pumps oil (1L/can)(SO-M)
Vacuum pumps oil (4L/can)(SO-M)
Vacuum pumps oil (18L/can)(SO-M)
Forline Trap(OFI-200C)
Forline Trap(OFI-200V)
Hose port suction pipe, O.D. φ8xM20(-)
Hose port suction pipe, O.D. φ12xM20(-)
Hose port suction pipe, O.D. φ15xM20(-)
Hose port suction pipe, O.D. φ18xM20(-)
Hose port suction pipe, O.D. φ22xM20(-)
Hose port suction pipe, O.D. φ27x50mm sq. flange(-)
KF-25 suction pipe, KF-25 x50 mm sq. flange(-)
Suction adaptor, 50 mm sq. flange x M20 x P1(-)
A-type suction pipe, R1/4-L20 male thread x M20(-)
B-type suction pipe, R1/4 female thread x M20(-)
C-type suction pipe, R1/4-L10 male thread x M20(-)
KF-25 exhaust pipe, KF-25 x G1(-)
Hose port exhaust pipe, O.D. φ27xG1(-)
Vacuum Pumps, Compact(PX-52)
Vacuum Pumps, Compact(PX-202)