Plasma Cleaner (Parallel Electrode)

Plasma Cleaner (Parallel Electrode)(PDC610)

Item Code：328216

Model：PDC610

Power Source：AC220V~AC415VThree phase with step-down transformer

Origin：Japan

Product Summary

Plasma Surface Treatment Device

Features

Max. RF power 600W

RIE / DP mode switchable

Electrodes can be set among 1 to 3 stages

Integrated data logger can be installed (Optional)

Matching point memory function can be installed (Optional)

Specifications

Item Code

328216

Model

PDC610

Plasma Mode

RIE and DP mode changeable by touch panel

Electrode Structure

3-stage independent parallel flat stage

RF Power

MAX. 600W

Oscillation Frequency

13.56MHz　Quartz Oscillator

Chamber Dimensions

W350 × D270 × H300mm

Stage Size

W250 × D220mm x 3 stages

Chamber Material

Aluminium

Reaction Gas

2 systems（Ar, O2）

Purge Gas

N2 or Dry air

Vacuum Pump

Included (Approx. 345 L/min)

Gas Inlet Port

Reaction Gas: 2 points, Purge Gas: 1 point

Output Setting

Manual setting on LED touch panel

Internal dimensions（W×D×H mm）

350×270×300mm

External dimensions（W×D×H mm）

600×722×700mm

Power Source

AC220V~AC415VThree phase with step-down transformer

Weight

170kg

Catalog

Plasma Cleaner (Parallel Electrode)

Optional Items

Same Series Product

Plasma Cleaner (Parallel Electrode)(PDC200)

Plasma Cleaner (Parallel Electrode)(PDC210)

Plasma Cleaner (Parallel Electrode)(PDC510)