Plasma Cleaner (Parallel Electrode)

Plasma Cleaner (Parallel Electrode)(PDC510)

Item Code：215054

Model：PDC510

Power Source：AC200V~AC415VThree phase with step-down transformer

Origin：Japan

Product Summary

Plasma Surface Treatment Device

Features

Simple and compact plasma surface treatment device

RIE / DP mode changeable

Excellent electrode structure for plasma uniformity

Touch panel for easy operation

Equipped with 0 point stability vacuum manometer

Specifications

Item Code

215054

Model

PDC510

Plasma Mode

RIE / DP mode changeable

Electrode Structure

Parallel flat stage

RF Power

MAX. 500W

Oscillation Frequency

13.56MHz　Quartz Oscillator

Display

LED touch panel

Chamber Dimensions

W500 × D300 × H200mm

Stage Size

W400 × D200mm

Chamber Material

Aluminium

Reaction Gas

2 systems（Ar, O2）

Purge Gas

N2 or Dry air

Reaction Gas Flow Control

Mass flow controller

Vacuum Pump

Included (Aprox. 500 L/min)

Gas Inlet Port

Reaction Gas: 2 points, Purge Gas: 1 point

Internal dimensions（W×D×H mm）

500×300×200mm

External dimensions（W×D×H mm）

700×700×1285mm

Power Source

AC200V~AC415VThree phase with step-down transformer

Weight

180kg

Catalog

Plasma Cleaner (Parallel Electrode)

Optional Items

Same Series Product

Plasma Cleaner (Parallel Electrode)(PDC200)

Plasma Cleaner (Parallel Electrode)(PDC210)

Plasma Cleaner (Parallel Electrode)(PDC610)