Plasma Cleaner (Parallel Electrode)

Plasma Cleaner (Parallel Electrode)(PDC210)

Item Code：328211

Model：PDC210

Power Source：AC220V ~AC415VThree phase with step-down transformer

Origin：Japan

Product Summary

Small and compact, suitable for R&D or any other dry cleaning processes

Features

Simple and compact plasma surface treatment device

RIE mode (DP mode is optional)

Excellent electrode structure for plasma uniformity

Touch panel for easy operation

Equipped with 0 point stability vacuum manometer

Specifications

Item Code

328211

Model

PDC210

Plasma Mode

RIE（DP mode is optional）

Electrode Structure

Parallel flat stage

RF Power

MAX. 500W

Oscillation Frequency

13.56MHz　Quartz Oscillator

Display

LED touch panel

Chamber Dimensions

W400 × D250 × H150mm

Stage Size

W250 × D170mm

Chamber Material

Aluminium

Reaction Gas

2 systems（Ar, O2）

Purge Gas

N2 or Dry air

Reaction Gas Flow Control

Mass flow controller

Vacuum Pump

Included (345 L/min)

Gas Inlet Port

Reaction Gas: 2 points, Purge Gas: 1 point

Internal dimensions（W×D×H mm）

400×250×150mm

External dimensions（W×D×H mm）

540×600×600mm

Power Source

AC220V ~AC415VThree phase with step-down transformer

Weight

105kg

Catalog

Plasma Cleaner (Parallel Electrode)

Optional Items

Same Series Product

Plasma Cleaner (Parallel Electrode)(PDC200)

Plasma Cleaner (Parallel Electrode)(PDC510)

Plasma Cleaner (Parallel Electrode)(PDC610)