Plasma Reactor (Barrel Chamber)

Plasma Reactor (Barrel Chamber)(PR301)

Item Code：215008

Model：PR301

Power Source：AC115V/AC220VSingle phase with step-down transformer

Origin：Japan

Product Summary

Compact, Barrel Type, Low Temperature Ashing Device

Features

RF Power: 300W

Space-saving due to the compact design

Adjustable RF power for various application

Flexible setting range of output to cope with a variety of testings

Specifications

Item Code

215008

Model

PR301

System

DP mode, Barrel type

High Frequency Output

Max. 300W

Oscillation Frequency

13.56MHz

Tuning Method

Manual biaxial

Reaction Chamber

Pyrex Glass φ118 × L160mm x 1 chamber

Reaction Gas System

1 system (oxygen), flow meter

Control System

Auto pressure regulation and Auto leakage valve

Piping Material

SUS, Teflon

Accessory

Vacuum grease x 1 pc, O-ring for reaction chamber x 1 pc

Internal dimensions（φ×D mm）

φ118×160mm

External dimensions（W×D×H mm）

438×520×630mm

Remarks(dimensions)

118φ x 160Dmm x 1 chamber

Power Source

AC115V/AC220VSingle phase with step-down transformer

Weight

34kg

Catalog

Plasma Modifier (Barrel Chamber)

Optional Items

Same Series Product

Plasma Reactor (Barrel Chamber)(PR200)

Plasma Reactor (Barrel Chamber)(PR300)

Plasma Reactor (Barrel Chamber)(PR510)

Plasma Reactor (Barrel Chamber)(PR500)