System
DP mode, Barrel type
High Frequency Output
Max. 300W (100W x 3 chambers)
Oscillation Frequency
13.56MHz
Tuning Method
Manual biaxial
Reaction Chamber
Pyrex Glass φ64 × 160mm x 3 chambers
Reaction Gas System
1 system (oxygen), flow meter
Control System
Auto pressure regulation and Auto leakage valve
Piping Material
SUS, Teflon, copper and brass
External Dimensions
W438 × D520 × H556mm (without projection)
Accessory
Sample dish (large and small) x 1 each, Sample shelf x 1 pc, Vacuum grease x 1 pc, O-ring for reaction chamber x 3pcs
External dimensions(W×D×H mm)
438×520×556mm
Power Source
AC115V/AC220VSingle-phase with step down transformer