Plasma Reactor (Barrel Chamber)

Plasma Reactor (Barrel Chamber)(PR200)

Item Code：215016

Model：PR200

Power Source：AC115V/AC220VSingle phase with step-down transformer

Origin：Japan

Product Summary

Compact, Barrel Type, Low Temperature Ashing Device

Features

RF Power: 200W

Space-saving due to the compact design

Adjustable RF power for various application

Flexible setting range of output to cope with a variety of testings

Specifications

Item Code

215016

Model

PR200

System

DP mode, Barrel type

High Frequency Output

Max. 200W

Oscillation Frequency

13.56MHz

Tuning Method

Automatic

Reaction Chamber

Pyrex Glass φ100× L160mm

Reaction Gas System

1 system (oxygen), flow meter

Control System

Manual leakage valve

Piping Material

SUS、Teflon

External Dimensions

W350 × D400× H500mm (without projection）

Accessory

Specimen stand x 1pc

Internal dimensions（φ×D mm）

φ100×160mm

External dimensions（W×D×H mm）

350×400×500mm

Power Source

AC115V/AC220VSingle phase with step-down transformer

Weight

25kg

Catalog

Plasma Modifier (Barrel Chamber)

Optional Items

Oil Mist Trap for Low level vacuum(OMT-050A)

Vacuum pump(PQ30)

Stand for PR200(OPR12)

Seismic bracket(OPR14)

Vacuum rubber hose, 　I.D. 15mm x 2m()

Same Series Product

Plasma Reactor (Barrel Chamber)(PR300)

Plasma Reactor (Barrel Chamber)(PR301)

Plasma Reactor (Barrel Chamber)(PR510)

Plasma Reactor (Barrel Chamber)(PR500)