Product Summary
Usage: Post-photolithography process, photoresist curing.
Features
U Maximum working temperature of 360℃ and 600℃, class 100 of cleanliness, oxygen concentration below 20ppm
Program operation function, with both automatic and manual operation modes
Rapid heating and cooling, cooling can through both air cooling and air cooling with water cooling
Equipped with automatic door lock, digital pressure gauge, digital flow meter, etc
All stainless steel material
In terms of safety, equipped with automatic overheating prevention, overheating preventer, nitrogen pressure abnormality, nitrogen flow abnormality, over-current and leakage protection circuit breaker, etc
Specifications
Catalog
Optional Items
Same Series Product
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